By J. Reed (auth.), K. L. Mittal (eds.)

ISBN-10: 146127852X

ISBN-13: 9781461278528

ISBN-10: 1461305314

ISBN-13: 9781461305316

This quantity records the complaints of the second one Symposium on debris on Surfaces: Detection, Adhesion and removing held as a part of the nineteenth Annual assembly of the fantastic Particle Society in Santa Clara, California, July 20-25, 1988. The most excellent symposium in this subject was once l prepared in 1986 and has been effectively chronicled . in keeping with the luck of those occasions and the excessive curiosity evinced through the technical group, we plan to usually carry symposia in this subject on a biennial foundation and the subsequent one is slated for August 20-24, 1990 in San Diego, California. l As mentioned within the Preface to the 1st quantity , the subject of debris on surfaces is of paramount value in legion of technological components. quite within the semiconductor gadget fabrication zone, all signs point out that the certainty of the habit of debris on surfaces and their elimination will reach heightened value within the instances to return. because the gadget dimensions are shrinking at an speeded up speed, so the benign debris of this day turns into the killer defects within the now not too far-off destiny. The pace of analysis and improvement job within the box of debris on surfaces is particularly excessive, and higher and novel methods are regularly being devised to take away smaller and smaller particles.

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Extra info for Particles on Surfaces 2: Detection, Adhesion, and Removal

Sample text

Mittal, Editor, Plenum Press, New York, 1988. L. R. Fisher and J. N. Israelachvili, Colloids Surfaces, 3, 303-319 (1981 ) . A. D. Zimon (R. K. Johnston, Translator), "Adhesion of Dust and Powder;'" 2nd Edition, Consultants Bureau, New York (1982). W. J. Whitfield, in "Surface Contamination: Genesis, Detection, and Control," Vol. 1, pp. 73-82, K. L. Mittal, Editor, Plenum Press, New York (1979). F. M. Orr, L. E. Scriven, and A. P. Rivas, J. , 67, 723-742 (1975). G. Mason and W. C. Clark, Chern. Eng.

Fichman and Pnueli calculated critical velocity from the energy loss which is considered to occur in the ring of plastic deformation at the edge of contact area, where the material is in tension. Even when numerous errors in the equations are corrected, the model of Fichman and Pnueli greatly underestimates the critical velocity for particle bounce and the associated dependence on particle size. CONCLUSION There is currently no comprehensive theory for particle surface impacts which fully accounts for the components of energy loss.

A. Bowling, J. Electrochem. , ~, 2208-2214 (1985). L. R. Fisher and J. N. Israelachvili, J. , 80, 528-541 (1981). J. C. , ~, 986-994 (1966). B. V. Deryagin, N. A. Krotova, and V. P. Smilga (R. K. Johnston, Translator), "Adhesion of Sol ids," Consultants Bureau, New York, 1978. W. S. Bickel and T. M. Wentzel, in "Particles on Surfaces 1: Detection, Adhesion, and Removal," pp. 225-236, K. L. Mittal, Editor, Plenum Press, New York, 1988. L. R. Fisher and J. N. Israelachvili, Colloids Surfaces, 3, 303-319 (1981 ) .

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Particles on Surfaces 2: Detection, Adhesion, and Removal by J. Reed (auth.), K. L. Mittal (eds.)


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